FIB Services

The FIB is a versatile and precise tool that uses a focused beam of ions to deposit or remove material. It can be used in conjunction with SEM, TEM and EDS to provide both metrology and elemental data at nanometer scales. Using the FIB, we are able to provide a variety of services:

  • FIB/SEM for device cross sections along with EDS mapping for elemental analysis

    • Site specific cross sectioning with high resolution SEM imaging

    • Rapid and precise sample processing

    • Cross section EDS mapping for elemental analysis

  • FIB sample preparation for TEM/STEM

    • Sub nm resolution capabilites provides excellent metrology of small features

    • Capable of producing ultra thin damage free samples

    • Ultra high resoluton EDS mapping for elemental analysis